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[IEEE IAS '96. Conference Record of the 1996 IEEE Industry Applications Conference Thirty-First IAS Annual Meeting - San Diego, CA, USA (6-10 Oct. 1996)] IAS '96. Conference Record of the 1996 IEEE Industry Applications Conference Thirty-First IAS Annual Meeting - X-Y positioner driven by electrostatic motor

✍ Scribed by Niino, T.; Ban, T.; Yamamoto, A.; Higuchi, T.

Book ID: 126760747
Publisher: IEEE
Year: 1996
Weight: 536 KB
Volume: 4
Category: Article
ISBN-13: 9780780335448
DOI: 10.1109/IAS.1996.563845

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