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[IEEE IAS '96. Conference Record of the 1996 IEEE Industry Applications Conference Thirty-First IAS Annual Meeting - San Diego, CA, USA (6-10 Oct. 1996)] IAS '96. Conference Record of the 1996 IEEE Industry Applications Conference Thirty-First IAS Annual Meeting - Direct electrostatic levitation and propulsion of silicon wafer

โœ Scribed by Ju Jin, ; Jong Up Jeon, ; Higuchi, T.


Book ID
125530979
Publisher
IEEE
Year
1996
Tongue
English
Weight
804 KB
Volume
4
Category
Article
ISBN-13
9780780335448

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