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[IEEE Fourteenth Biennial University/Government/Industry Microelectronics Symposium - Richmond, VA, USA (17-20 June 2001)] Proceedings of the Fourteenth Biennial University/Government/Industry Microelectronics Symposium (Cat. No.01CH37197) - Fabrication of polysilicon surface micromachined MEMS structures

โœ Scribed by Munger, K.; Fuller, L.F.


Book ID
126608977
Publisher
IEEE
Year
2001
Weight
419 KB
Category
Article
ISBN-13
9780780366916

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