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[IEEE Fourteenth Biennial University/Government/Industry Microelectronics Symposium - Richmond, VA, USA (17-20 June 2001)] Proceedings of the Fourteenth Biennial University/Government/Industry Microelectronics Symposium (Cat. No.01CH37197) - Fabrication of polysilicon surface micromachined MEMS structures

✍ Scribed by Munger, K.; Fuller, L.F.

Book ID: 126608977
Publisher: IEEE
Year: 2001
Weight: 419 KB
Category: Article
ISBN-13: 9780780366916
DOI: 10.1109/UGIM.2001.960322

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