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[IEEE Fourteenth Biennial University/Government/Industry Microelectronics Symposium - Richmond, VA, USA (17-20 June 2001)] Proceedings of the Fourteenth Biennial University/Government/Industry Microelectronics Symposium (Cat. No.01CH37197) - Rapid MEMS prototyping using SU-8, wafer bonding and deep reactive ion etching

✍ Scribed by Sampath, S.K.; St. Clair, L.; Xingtao Wu, ; Ivanov, D.V.; Wang, Q.; Ghosh, C.; Farmer, K.R.

Book ID: 120803500
Publisher: IEEE
Year: 2001
Weight: 447 KB
Category: Article
ISBN-13: 9780780366916
DOI: 10.1109/UGIM.2001.960320

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