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[IEEE ESSDERC 2012 - 42nd European Solid State Device Research Conference - Bordeaux, France (2012.09.17-2012.09.21)] 2012 Proceedings of the European Solid-State Device Research Conference (ESSDERC) - Thin germanium dioxide film with a high quality interface formed in a direct neutral beam oxidation process

✍ Scribed by Wada, Akira; Samukawa, Seiji; Zhang, Rui; Takagi, Shinichi

Book ID: 126725416
Publisher: IEEE
Year: 2012
Weight: 698 KB
Category: Article
ISBN: 1467317063
DOI: 10.1109/ESSDERC.2012.6343339

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