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[IEEE ESSDERC 2003. 33rd European Solid-State Device Research - ESSDERC '03 - Estoril, Portugal (16-18 Sept. 2003)] Electrical Performance of Electrical Packaging (IEEE Cat. No. 03TH8710) - Silicon clean impact on 90nm CMOS devices performance

✍ Scribed by Carrere, J.-P.; Bernard, H.; Petitdidier, S.; Beverina, A.; Rosa, J.; Guyader, F.

Book ID: 126594025
Publisher: IEEE
Year: 2003
Tongue: English
Weight: 264 KB
Category: Article
ISBN-13: 9780780379992
DOI: 10.1109/ESSDERC.2003.1256857

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