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[IEEE Conference on Optoelectronic and Microelectronic Materials and Devices - COMMAD'98 - Perth, WA, Australia (14-16 Dec. 1998)] 1998 Conference on Optoelectronic and Microelectronic Materials and Devices. Proceedings (Cat. No.98EX140) - UV-LIGA: a promising and low-cost variant for microsystem technology

✍ Scribed by Wenmin Qu, ; Wenzel, C.; Jahn, A.; Zeidler, D.

Book ID: 120088241
Publisher: IEEE
Year: 1999
Weight: 571 KB
Category: Article
ISBN-13: 9780780345133
DOI: 10.1109/COMMAD.1998.791668

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