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[IEEE ASDAM'02 (4th International Conference on Advanced Semiconductor Devices and Microsystems) - Smolenice Castle, Slovakia (14-16 Oct. 2002)] The Fourth International Conference on Advanced Semiconductor Devices and Microsystem - Auger investigations of GaAs sputtered with low-energy Ar/sup +/ ions at glancing incidence

✍ Scribed by Kosiba, R.; Ecke, G.; Breza, J.; Liday, J.

Book ID: 126669148
Publisher: IEEE
Year: 2002
Weight: 194 KB
Category: Article
ISBN-13: 9780780372764
DOI: 10.1109/ASDAM.2002.1088507

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