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[IEEE 9th International Vacuum Microelectronics Conference - St. Petersburg, Russia (7-12 July 1996)] 9th International Vacuum Microelectronics Conference - Selected-area deposition of diamond films on SiN/Si surfaces with microwave plasma enhanced CVD

✍ Scribed by Yung-Hsin Chen, ; Chen-Ti Hu, ; I-Nan Lin,

Book ID: 121256450
Publisher: IEEE
Year: 1996
Weight: 697 KB
Category: Article
ISBN-13: 9780780335943
DOI: 10.1109/IVMC.1996.601858

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