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[IEEE 9th International Vacuum Microelectronics Conference - St. Petersburg, Russia (7-12 July 1996)] 9th International Vacuum Microelectronics Conference - Formation of thin silicide films on Ta and Nb surfaces

✍ Scribed by Afanas'eva, E.Yu.; Solov'ev, S.M.

Book ID: 121016140
Publisher: IEEE
Year: 1996
Weight: 195 KB
Category: Article
ISBN-13: 9780780335943
DOI: 10.1109/IVMC.1996.601807

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