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[IEEE 8th International Conference on Indium Phosphide and Related Materials - Schwabisch-Gmund, Germany (21-25 April 1996)] Proceedings of 8th International Conference on Indium Phosphide and Related Materials - Passivation of InGaAs surfaces with an integrated process including an ammonia DECR plasma

✍ Scribed by Lescaut, B.; Nissim, Y.I.; Bresse, J.F.

Book ID: 126764639
Publisher: IEEE
Year: 1996
Weight: 535 KB
Category: Article
ISBN-13: 9780780332836
DOI: 10.1109/ICIPRM.1996.492043

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