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[IEEE 8th International Conference on Indium Phosphide and Related Materials - Schwabisch-Gmund, Germany (21-25 April 1996)] Proceedings of 8th International Conference on Indium Phosphide and Related Materials - Material system using HBr gas and a 172 nm excimer lamp

✍ Scribed by Tanaka, J.; Habibi, S.; Hattori, H.; Matsumoto, S.

Book ID: 111893770
Publisher: IEEE
Year: 1996
Weight: 376 KB
Volume: 0
Category: Article
ISBN-13: 9780780332836
DOI: 10.1109/iciprm.1996.492272

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