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[IEEE 2014 IEEE Workshop On Microelectronics And Electron Devices (WMED) - Boise, ID, USA (2014.04.18-2014.04.18)] 2014 IEEE Workshop On Microelectronics And Electron Devices (WMED) - Scanning frequency comb microscopy (SFCM) shows promise for sub-10 nm dopant profiling

✍ Scribed by Hagmann, Mark J.; Andrei, Petru

Book ID: 121861543
Publisher: IEEE
Year: 2014
Weight: 680 KB
Category: Article
ISBN: 1479922226
DOI: 10.1109/WMED.2014.6818724

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