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[IEEE 2014 IEEE Symposium on VLSI Technology - Honolulu, HI, USA (2014.6.9-2014.6.12)] 2014 Symposium on VLSI Technology (VLSI-Technology): Digest of Technical Papers - Simple Gate Metal Anneal (SIGMA) stack for FinFET Replacement Metal Gate toward 14nm and beyond

✍ Scribed by Ando, T.; Kannan, B.; Kwon, U.; Lai, W. L.; Linder, B. P.; Cartier, E. A.; Haight, R.; Copel, M.; Bruley, J.; Krishnan, S. A.; Narayanan, V.

Book ID: 126461560
Publisher: IEEE
Year: 2014
Weight: 451 KB
Category: Article
ISBN: 1479933309
DOI: 10.1109/VLSIT.2014.6894358

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