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[IEEE 2014 IEEE Symposium on VLSI Technology - Honolulu, HI, USA (2014.6.9-2014.6.12)] 2014 Symposium on VLSI Technology (VLSI-Technology): Digest of Technical Papers - Laser thermal anneal of polysilicon channel to boost 3D memory performance

✍ Scribed by Lisoni, J. G.; Arreghini, A.; Congedo, G.; Toledano-Luque, M.; Toque-Tresonne, I.; Huet, K.; Capogreco, E.; Liu, L.; Tan, C.-L.; Degraeve, R.; Van den bosch, G.; Van Houdt, J.

Book ID: 126461559
Publisher: IEEE
Year: 2014
Weight: 663 KB
Category: Article
ISBN: 1479933309
DOI: 10.1109/VLSIT.2014.6894346

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