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[IEEE 2014 15th International Conference of Young Specialists on Micro/Nanotechnologies and Electron Devices (EDM) - Novosibirsk, Russia (2014.6.30-2014.7.4)] 2014 15th International Conference of Young Specialists on Micro/Nanotechnologies and Electron Devices (EDM) - Synthesis of conducting films In2O3:Sn with the method of magnetron sputtering and their electrophysical properties

✍ Scribed by Troyan, Pavel E.; Zhidik, Yury S.; Sakharov, Yury V.

Book ID: 127236950
Publisher: IEEE
Year: 2014
Weight: 322 KB
Category: Article
ISBN: 1479946699
DOI: 10.1109/edm.2014.6882486

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