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[IEEE 2014 15th International Conference of Young Specialists on Micro/Nanotechnologies and Electron Devices (EDM) - Novosibirsk, Russia (2014.6.30-2014.7.4)] 2014 15th International Conference of Young Specialists on Micro/Nanotechnologies and Electron Devices (EDM) - Methods of ultrasonic technological equipment improving

✍ Scribed by Khmelev, Vladimir N.; Barsukov, Roman V.; Ilchenko, Evgeniy V.

Book ID: 126962037
Publisher: IEEE
Year: 2014
Weight: 296 KB
Category: Article
ISBN: 1479946699
DOI: 10.1109/edm.2014.6882513

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