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[IEEE 2014 15th International Conference of Young Specialists on Micro/Nanotechnologies and Electron Devices (EDM) - Novosibirsk, Russia (2014.6.30-2014.7.4)] 2014 15th International Conference of Young Specialists on Micro/Nanotechnologies and Electron Devices (EDM) - Study of gallium nitride surface treatment prior to PE CVD SiNx:H passivation

โœ Scribed by Parfenova, Maria A.; Protasov, Dmitrii Yu.; Malin, Timur V.; Nastoviak, Artem E.; Devyatova, Svetlana F.; Zhuravlev, Konstantin S.


Book ID
126879824
Publisher
IEEE
Year
2014
Weight
247 KB
Category
Article
ISBN
1479946699

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