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[IEEE 2014 14th International Workshop on Junction Technology (IWJT) - Shanghai, China (2014.5.18-2014.5.20)] 2014 International Workshop on Junction Technology (IWJT) - Imaging and nano-probing of doping in Si by site-specific scanning spreading resistance microscopy (SSRM)

✍ Scribed by Zhang, L.; Suguro, K.; Ohuchi, K.; Hara, K.; Hayase, Y.

Book ID: 125486013
Publisher: IEEE
Year: 2014
Weight: 314 KB
Category: Article
ISBN: 1479936278
DOI: 10.1109/IWJT.2014.6842028

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