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[IEEE 2013 International Conference on IC Design & Technology (ICICDT) - Pavia, Italy (2013.05.29-2013.05.31)] Proceedings of 2013 International Conference on IC Design & Technology (ICICDT) - Impact of precursors choice on characteristics of PEALD SiN for spacer applications

✍ Scribed by Triyoso, D.H.; Hempel, K.; Ohsiek, S.; Shu, J.; Schaeffer, J.K.; Lenski, M.

Book ID: 121718162
Publisher: IEEE
Year: 2013
Weight: 372 KB
Category: Article
ISBN: 1467347418
DOI: 10.1109/icicdt.2013.6563305

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