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[IEEE 2013 IEEE International Nanoelectronics Conference (INEC) - Singapore, Singapore (2013.01.2-2013.01.4)] 2013 IEEE 5th International Nanoelectronics Conference (INEC) - Realization and application of nanometer E-beam lithography system

✍ Scribed by Shuhua, Wei; Lan, Dai; Jing, Zhang

Book ID: 121241261
Publisher: IEEE
Year: 2013
Weight: 538 KB
Category: Article
ISBN: 1467348414
DOI: 10.1109/INEC.2013.6465985

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