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[IEEE 2013 IEEE 40th International Conference on Plasma Sciences (ICOPS) - San Francisco, CA, USA (2013.06.16-2013.06.21)] 2013 Abstracts IEEE International Conference on Plasma Science (ICOPS) - Parametric studyoflow frequency rotating structures in high power impulse magnetron sputtering (HIPIMS) discharges

โœ Scribed by Gallian, Sara; Mussenbrock, Thomas; Brinkmann, Ralf-Peter; Hitchon, William N. G.


Book ID
121751583
Publisher
IEEE
Year
2013
Weight
76 KB
Category
Article
ISBN
1467351717

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