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[IEEE 2013 IEEE 40th International Conference on Plasma Sciences (ICOPS) - San Francisco, CA, USA (2013.06.16-2013.06.21)] 2013 Abstracts IEEE International Conference on Plasma Science (ICOPS) - High power pulse plasma generator with oscillatory voltage waveforms for magnetron sputtering applications

✍ Scribed by Chistyakov, Roman; Abraham, Bassam

Book ID: 125430915
Publisher: IEEE
Year: 2013
Weight: 48 KB
Category: Article
ISBN: 1467351717
DOI: 10.1109/plasma.2013.6633435

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