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[IEEE 2013 IEEE 26th International Conference on Micro Electro Mechanical Systems (MEMS) - Taipei, Taiwan (2013.01.20-2013.01.24)] 2013 IEEE 26th International Conference on Micro Electro Mechanical Systems (MEMS) - Proof mass effects on spiral electrode d33 mode piezoelectric diaphragm-based energy harvester

✍ Scribed by Shen, Zhiyuan; Liu, Shuwei; Miao, Jianmin; Woh, Lye Sun; Wang, Zhihong

Book ID: 121211218
Publisher: IEEE
Year: 2013
Weight: 574 KB
Category: Article
ISBN: 1467356549
DOI: 10.1109/MEMSYS.2013.6474369

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