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[IEEE 2013 IEEE 26th International Conference on Micro Electro Mechanical Systems (MEMS) - Taipei, Taiwan (2013.01.20-2013.01.24)] 2013 IEEE 26th International Conference on Micro Electro Mechanical Systems (MEMS) - A microplasma chip for VUV light source

✍ Scribed by Sato, Ryoto; Yasumatsu, Daisuke; Kumagai, Shinya; Hori, Masaru; Sasaki, Minoru

Book ID: 121210510
Publisher: IEEE
Year: 2013
Weight: 727 KB
Category: Article
ISBN: 1467356549
DOI: 10.1109/MEMSYS.2013.6474340

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