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[IEEE 2013 IEEE 26th International Conference on Micro Electro Mechanical Systems (MEMS) - Taipei, Taiwan (2013.01.20-2013.01.24)] 2013 IEEE 26th International Conference on Micro Electro Mechanical Systems (MEMS) - Low voltage — Enhanced actuation MEMS cantilevers using Al2O3-SiO2 electrets

✍ Scribed by Pai, Pradeep; Tabib-Azar, Massood


Book ID
121209844
Publisher
IEEE
Year
2013
Weight
437 KB
Category
Article
ISBN
1467356549

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