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[IEEE 2013 IEEE 26th International Conference on Micro Electro Mechanical Systems (MEMS) - Taipei, Taiwan (2013.01.20-2013.01.24)] 2013 IEEE 26th International Conference on Micro Electro Mechanical Systems (MEMS) - Epitaxially-encapsulated polysilicon disk resonator gyroscope

✍ Scribed by Nitzan, S.; Ahn, C. H.; Su, T.-H.; Li, M.; Ng, E. J.; Wang, S.; Yang, Z. M.; O'Brien, G.; Boser, B. E.; Kenny, T. W.; Horsley, D. A.

Book ID: 121207703
Publisher: IEEE
Year: 2013
Weight: 854 KB
Category: Article
ISBN: 1467356549
DOI: 10.1109/MEMSYS.2013.6474319

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