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[IEEE 2013 IEEE 26th International Conference on Micro Electro Mechanical Systems (MEMS) - Taipei, Taiwan (2013.01.20-2013.01.24)] 2013 IEEE 26th International Conference on Micro Electro Mechanical Systems (MEMS) - Methods for the microfabrication of magnesium

✍ Scribed by Tsang, Melissa; Herrault, Florian; Shafer, Richard H.; Allen, Mark G.

Book ID: 121205639
Publisher: IEEE
Year: 2013
Weight: 813 KB
Category: Article
ISBN: 1467356549
DOI: 10.1109/MEMSYS.2013.6474249

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