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[IEEE 2012 7th IEEE International Conference on Nano/Micro Engineered and Molecular Systems (NEMS) - Kyoto (2012.03.5-2012.03.8)] 2012 7th IEEE International Conference on Nano/Micro Engineered and Molecular Systems (NEMS) - Characterization of a multi-layered MEMS pressure sensor using piezoresistive silicon nanowire within large measurable strain range

โœ Scribed by Liang Lou, ; Songsong Zhang, ; Woo-Tae Park, ; Lishiah Lim, ; Dim-Lee Kwong, ; Chengkuo Lee,


Book ID
118241316
Publisher
IEEE
Year
2012
Weight
743 KB
Category
Article
ISBN
1467311235

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