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[IEEE 2012 7th IEEE International Conference on Nano/Micro Engineered and Molecular Systems (NEMS) - Kyoto, Japan (2012.03.5-2012.03.8)] 2012 7th IEEE International Conference on Nano/Micro Engineered and Molecular Systems (NEMS) - Analysis of air damping in micromachined resonators

✍ Scribed by Wu, Guoqiang; Xu, Dehui; Xiong, Bin; Ma, Yinglei; Wang, Yuelin; Jing, Errong

Book ID: 118207135
Publisher: IEEE
Year: 2012
Weight: 723 KB
Category: Article
ISBN: 1467311235
DOI: 10.1109/nems.2012.6196819

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