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[IEEE 2011 IEEE 24th International Conference on Micro Electro Mechanical Systems (MEMS) - Cancun, Mexico (2011.01.23-2011.01.27)] 2011 IEEE 24th International Conference on Micro Electro Mechanical Systems - Ss-DNA functionalized array of ALN Contour-Mode NEMS Resonant Sensors with single CMOS multiplexed oscillator for sub-ppb detection of volatile organic chemicals

✍ Scribed by Rinaldi, M.; Zuniga, C.; Piazza, G.

Book ID: 121314843
Publisher: IEEE
Year: 2011
Weight: 921 KB
Category: Article
ISBN: 1424496322
DOI: 10.1109/MEMSYS.2011.5734590

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