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[IEEE 2011 IEEE 24th International Conference on Micro Electro Mechanical Systems (MEMS) - Cancun, Mexico (2011.01.23-2011.01.27)] 2011 IEEE 24th International Conference on Micro Electro Mechanical Systems - Piezoelectric MEMS deformable mirrors with high-density actuator array

✍ Scribed by Sato, M.; Kanno, I.; Kotera, H.; Tabata, O.

Book ID: 121317018
Publisher: IEEE
Year: 2011
Weight: 977 KB
Category: Article
ISBN: 1424496322
DOI: 10.1109/MEMSYS.2011.5734663

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