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[IEEE 2011 12th International Conference on Ultimate Integration on Silicon (ULIS) - Cork, Ireland (2011.03.14-2011.03.16)] Ulis 2011 Ultimate Integration on Silicon - Lanthanum Lutetium oxide integration in a gate-first process on SOI MOSFETs

โœ Scribed by Nichau, A.; Ozben, E. Durgun; Schnee, M.; Lopes, J. M. J.; Besmehn, A.; Luysberg, M.; Knoll, L.; Habicht, S.; Mussmann, V.; Luptak, R.; Lenk, St.; Rubio-Zuazo, J.; Castro, G. R.; Buca, D.; Zhao, Q. T.; Schubert, J.; Mantl, S.


Book ID
126653979
Publisher
IEEE
Year
2011
Weight
279 KB
Category
Article
ISBN
1457700905

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