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[IEEE 2011 12th International Conference on Ultimate Integration on Silicon (ULIS) - Cork, Ireland (2011.03.14-2011.03.16)] Ulis 2011 Ultimate Integration on Silicon - Bulk FinFET fabrication with new approaches for oxide topography control using dry removal techniques

โœ Scribed by Redolfi, A.; Sleeckx, E.; Devriendt, K.; Shamiryan, D.; Vandeweyer, T.; Horiguchi, N.; Togo, M.; Wouter, J. M. D.; Jurczak, M.; Hoffmann, T.; Cockburn, A.; Gravey, V.; Diehl, D. L.


Book ID
125448033
Publisher
IEEE
Year
2011
Weight
207 KB
Category
Article
ISBN
1457700905

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