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[IEEE 2010 IEEE International Frequency Control Symposium (FCS) - Newport Beach, CA, USA (2010.06.1-2010.06.4)] 2010 IEEE International Frequency Control Symposium - A pressure sensor based on a HBAR micromachined structure

✍ Scribed by Baron, T.; Gachon, D.; Romand, J.P.; Alzuaga, S.; Ballandras, S.; Masson, J.; Catherinot, L.; Chatras, M.

No coin nor oath required. For personal study only.

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