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[IEEE 2010 IEEE International Frequency Control Symposium (FCS) - Newport Beach, CA, USA (2010.06.1-2010.06.4)] 2010 IEEE International Frequency Control Symposium - 50 nm thick AlN resonant micro-cantilever for gas sensing application

โœ Scribed by Ivaldi, P.; Abergel, J.; Arndt, G.; Robert, P.; Andreucci, P.; Blanc, H.; Hentz, S.; Defay, E.


Book ID
117993049
Publisher
IEEE
Year
2010
Weight
549 KB
Volume
0
Category
Article
ISBN
1424463998

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