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[IEEE 2010 5th IEEE International Conference on Nano/Micro Engineered and Molecular Systems (NEMS 2010) - Xiamen (2010.01.20-2010.01.23)] 2010 IEEE 5th International Conference on Nano/Micro Engineered and Molecular Systems - Stress in Si-glass anodic bonding and its effect on silicon piezoresistive pressure sensor

✍ Scribed by Xiaoshan Zheng, ; Wenshan Chen, ; Xuyuan Chen,

Book ID: 118253273
Publisher: IEEE
Year: 2010
Weight: 383 KB
Volume: 0
Category: Article
ISBN: 1424465435
DOI: 10.1109/nems.2010.5592452

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