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[IEEE 2010 5th IEEE International Conference on Nano/Micro Engineered and Molecular Systems (NEMS 2010) - Xiamen (2010.01.20-2010.01.23)] 2010 IEEE 5th International Conference on Nano/Micro Engineered and Molecular Systems - Modeling of a bistable MEMS mechanism with torsion/cantilever beams

✍ Scribed by Yibo Wu, ; Juan Wang, ; Xiaobo Zhang, ; Congchun Zhang, ; Guifu Ding,

Book ID: 118143404
Publisher: IEEE
Year: 2010
Weight: 728 KB
Volume: 0
Category: Article
ISBN: 1424465435
DOI: 10.1109/nems.2010.5592168

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