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[IEEE 2010 5th IEEE International Conference on Nano/Micro Engineered and Molecular Systems (NEMS 2010) - Xiamen (2010.01.20-2010.01.23)] 2010 IEEE 5th International Conference on Nano/Micro Engineered and Molecular Systems - Design and fabrication of a MEMS scanning mirror with and without comb offset

✍ Scribed by Yick Chuen Chan, ; Chun Cheong Wong, ; Congshun Wang, ; Wei Ma, ; Ho-Yin Chan, ; Shoulung Chen, ; Hon Lung Cheung, ; Lee, F C S; Chen-Jung Tsai,

Book ID: 115438803
Publisher: IEEE
Year: 2010
Weight: 647 KB
Volume: 0
Category: Article
ISBN: 1424465435
DOI: 10.1109/nems.2010.5592180

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