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[IEEE 2010 21st Annual IEEE/SEMI Advanced Semiconductor Manufacturing Conference (ASMC) - San Francisco, CA, USA (2010.07.11-2010.07.13)] 2010 IEEE/SEMI Advanced Semiconductor Manufacturing Conference (ASMC) - Investigation of an on product high-k/metal metrology methodology using an in-line, high throughput XPS measurement technique

✍ Scribed by Dai, Min; Klare, Mark; Rangarajan, Srinivasan; Chudzik, Michael P; Shepard, Joseph; Tai, Leo; Ronsheim, Paul; Kwan, Mike; Larson, Tom

Book ID: 126701192
Publisher: IEEE
Year: 2010
Weight: 191 KB
Category: Article
ISBN: 1424465176
DOI: 10.1109/ASMC.2010.5551418

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