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[IEEE 2009 International Semiconductor Conference (CAS 2009) - Sinaia, Romania (2009.10.12-2009.10.14)] 2009 International Semiconductor Conference - Reactive ion etching for patterning high aspect ratio and nanoscale features

โœ Scribed by Avram, M.; Avram, A.; Comanescu, F.; Popescu, A.M.; Voitincu, C.


Book ID
115472418
Publisher
IEEE
Year
2009
Weight
750 KB
Volume
0
Category
Article
ISBN
1424444136

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