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[IEEE 2009 IEEE International Electron Devices Meeting (IEDM) - Baltimore, MD, USA (2009.12.7-2009.12.9)] 2009 IEEE International Electron Devices Meeting (IEDM) - BEOL embedded RF-MEMS switch for mm-wave applications

✍ Scribed by Kaynak, M.; Ehwald, K. E.; Drews, J.; Scholz, R.; Korndorfer, F.; Knoll, D.; Tillack, B.; Barth, R.; Birkholz, M.; Schulz, K.; Sun, Y. M.; Wolansky, D.; Leidich, S.; Kurth, S.; Gurbuz, Y.

Book ID: 126653242
Publisher: IEEE
Year: 2009
Tongue: English
Weight: 956 KB
Category: Article
ISBN: 1424456398
DOI: 10.1109/IEDM.2009.5424219

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