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[IEEE 2009 22nd International Vacuum Nanoelectronics Conference (IVNC) - Hamamatsu, Japan (2009.07.20-2009.07.24)] 2009 22nd International Vacuum Nanoelectronics Conference - Formation of low energy electron beam with silicon field emitter arrays for space charge compensation in low-energy ion-implantation system

✍ Scribed by Taguchi, Shuhei; Takeuchi, Mitsuaki; Gotoh, Yasuhito; Tsuji, Hiroshi; Ishikawa, Junzo; Sakai, Shigeki

Book ID: 126655966
Publisher: IEEE
Year: 2009
Weight: 423 KB
Category: Article
ISBN: 1424435870
DOI: 10.1109/IVNC.2009.5271586

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