𝔖 Bobbio Scriptorium

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[IEEE 2008 IEEE 21st International Conference on Micro Electro Mechanical Systems - Tucson, AZ, USA (2008.01.13-2008.01.17)] 2008 IEEE 21st International Conference on Micro Electro Mechanical Systems - High-Q, tunable-gap MEMS variable capacitor actuated with an electrically floating plate

✍ Scribed by Hyung Suk Lee, ; Young Jun Yoon, ; Dong-Hoon Choi, ; Jun-Bo Yoon,

Book ID: 120079664
Publisher: IEEE
Year: 2008
Weight: 918 KB
Category: Article
ISBN: 1424417937
DOI: 10.1109/MEMSYS.2008.4443622

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