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[IEEE 2008 IEEE 21st International Conference on Micro Electro Mechanical Systems - Tucson, AZ, USA (2008.01.13-2008.01.17)] 2008 IEEE 21st International Conference on Micro Electro Mechanical Systems - New methods for liquid encapsulation in polymer MEMS structures

✍ Scribed by Matsumoto, S.; Ichikawa, N.

Book ID: 118228483
Publisher: IEEE
Year: 2008
Weight: 623 KB
Volume: 0
Category: Article
ISBN: 1424417937
DOI: 10.1109/memsys.2008.4443681

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