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[IEEE 2008 IEEE 14th International Mixed-Signals, Sensors, and Systems Test Workshop (IMS3TW 2008) - Vancouver, BC, Canada (2008.06.18-2008.06.20)] 2008 IEEE 14th International Mixed-Signals, Sensors, and Systems Test Workshop - Evaluation of a fully electrical test and calibration method for MEMS capacitive accelerometers

✍ Scribed by Dumas, N.; Azais, F.; Mailly, F.; Nouet, P.

Book ID: 121724758
Publisher: IEEE
Year: 2008
Weight: 717 KB
Category: Article
ISBN: 1424423953
DOI: 10.1109/IMS3TW.2008.4581616

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