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[IEEE 2007 International Conference on Perspective Technologies and Methods in MEMS Design - Lviv, Ukraine (2007.05.23-2007.05.26)] 2007 International Conference on Perspective Technologies and Methods in MEMS Design - Competitiveness Ensuring for Microelectronic Industry

✍ Scribed by Tkachenko, N.

Book ID: 126752353
Publisher: IEEE
Year: 2007
Weight: 280 KB
Category: Article
ISBN: 9665536141
DOI: 10.1109/MEMSTECH.2007.4283420

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