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[IEEE 2007 International Conference on Perspective Technologies and Methods in MEMS Design - Lviv, Ukraine (2007.05.23-2007.05.26)] 2007 International Conference on Perspective Technologies and Methods in MEMS Design - Trade-Off between Issues in AlN/SiO2/Si Pressure Sensor

✍ Scribed by Trang, Hoang; Philippe, Benech; Patrice, Rey; Marie-Helene, Vaudaine; Pierre, Lemaitre-Auger; Jean-Sebastien, Danel; Philippe, Robert

Book ID: 120648768
Publisher: IEEE
Year: 2007
Weight: 948 KB
Category: Article
ISBN: 9665536141
DOI: 10.1109/MEMSTECH.2007.4283449

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