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[IEEE 2007 IEEE/LEOS International Conference on Optical MEMS and Nanophotonics - Hualien, Taiwan (2007.08.12-2007.07.16)] 2007 IEEE/LEOS International Conference on Optical MEMS and Nanophotonics - The Study on 3D Electron Beam Lithography for Sub-micrometer Diffractive Optics

✍ Scribed by Yin, Hung-Lin; Hu, Joseph Y. C.; Yu, Chih-Sheng

Book ID: 120603746
Publisher: IEEE
Year: 2007
Weight: 407 KB
Category: Article
ISBN: 1424406412
DOI: 10.1109/OMEMS.2007.4373884

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