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[IEEE 2006 IEEE International Frequency Control Symposium and Exposition - Miami, FL, USA (2006.06.4-2006.06.7)] 2006 IEEE International Frequency Control Symposium and Exposition - High Overtone Bulk Acoustic Resonators built using Aluminum Nitride thin films deposited onto AT¿cut quartz plates

✍ Scribed by Masson, J.; Gachon, D.; Robert, L.; Bazin, N.; Friedt, J.-m.; Martin, G.; Alzuaga, S.; Rodolphe, R.; Guichardaz, B.; Ballandras, S.

Book ID: 111874331
Publisher: IEEE
Year: 2006
Weight: 222 KB
Volume: 0
Category: Article
ISBN-13: 9781424400744
DOI: 10.1109/freq.2006.275498

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